Conceptual design of a Langmüir probe for cold plasma characterization employing statistical design of experiments

Authors

  • Victor Hugo Camargo-Suarez Universidad EAFIT
  • Diego Andrés Acosta-Maya Universidad EAFIT https://orcid.org/0000-0001-8654-6116
  • Juan Manuel Jaramillo-O Universidad EAFIT

Keywords:

Plasma, Langmuir probe, conceptual design, design of experiments, plasma physics

Abstract


The characterization and control of plasma-assisted processes, has become increasingly urgent to adapt this kind technology to industrial contexts. This work presents the design and construction of a cold plasma characterization system by electrostatic means (Langmuir probe), based on concepts of plasma physics and tools of engineering, design of experiments and conceptual design. The result of this work is a functional prototype probe and some measurements on the reactor

|Abstract
= 23 veces | PDF (ESPAÑOL (ESPAÑA))
= 14 veces|

Downloads

Download data is not yet available.

References

R. Merlino. “Understanding Langmuir probe current-voltage characteristics”. American Journal Physics. Vol. 75. 2007. pp. 1078-1085.

V. Demidov, S. Ratynskaia, K. Rypdal. “Electric probes for plasmas: The link between theory and instrument”. Review of scientific instruments. Vol. 73. 2002. pp. 3409-3439.

J. Roth. “Industrial plasma engineering”: Industrial plasma engineering. Vol. 2. Ed. IOP Publishing. London, England. 2003.

J. Grey. “Method and device for determining properties of an ionized gas”. US. Patent No. 3459039. August 5, 1969.

A. Azooz. “Analog Data Acquisition for Obtaining I–V Characteristics Using Sound Cards. Computing in Science and Engineering. Vol. 8. 2006. pp. 10-15.

R. Carnile, T. Ariz, S. Ghea. “Langmüir probe system for radio frequency excited plasma processing system”. U.S. Invention patent No. 5339039. August 16, 1994.

G. Rodríguez. Artefactos: Diseño Conceptual. Ed. Universidad EAFIT. Medellín, Colombia. 2003.

V. Camargo, J. Jaramillo. Implementación de un Sistema de Caracterización de Plasma por Sonda de Langmuir. Ed. Universidad EAFIT. Medellin, Colombia. 2010.

Published

2013-08-16

How to Cite

Camargo-Suarez, V. H., Acosta-Maya, D. A., & Jaramillo-O, J. M. (2013). Conceptual design of a Langmüir probe for cold plasma characterization employing statistical design of experiments. Revista Facultad De Ingeniería Universidad De Antioquia, (67), 76–88. Retrieved from https://revistas.udea.edu.co/index.php/ingenieria/article/view/16312