Conceptual design of a Langmüir probe for cold plasma characterization employing statistical design of experiments
Keywords:Plasma, Langmuir probe, conceptual design, design of experiments, plasma physics
The characterization and control of plasma-assisted processes, has become increasingly urgent to adapt this kind technology to industrial contexts. This work presents the design and construction of a cold plasma characterization system by electrostatic means (Langmuir probe), based on concepts of plasma physics and tools of engineering, design of experiments and conceptual design. The result of this work is a functional prototype probe and some measurements on the reactor
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