Influence of boehmite intermediate layer as covalent linker on synthesis of LTA zeolite coatings

Keywords: Coating, zeolite, hydrothermal synthesis, boehmite, silicon support

Abstract

The incorporation of nanostructured materials, such as LTA-type zeolite on the silicon wafers, opens a very interesting door to the use of these materials within silicon based microfabrication technologies. This work studies the deposition and intergrowth of defect-free LTA-type zeolite layer onto 3-inch Silicon wafers with a layer of SiO2 subjected to pretreatment. The main disadvantage associated with zeolite layer synthesis are crack the formation of cracks and difficulty of obtaining a uniform layer. By modifying the supports with boehmite, a substantial improvement was observed in terms of layer continuity and crystal intergrowth in comparrison to coatings prepared on cationic polymer, poly (diallyldimethylammonium chloride). An LTA- type zeolite layer was synthesized in a range of 350 to 1300 nm via hydrothermal ex-situ method at 363 K for 12 h. Tetramethylammonium hydroxide (TMAOH) was used as a template, and aluminum isopropoxide and colloidal silica were used as Al and Si sources, respectively.

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Author Biographies

Leidys Marleyn Rodríguez Castro, Unidades Tecnológicas de Santander

Assistant professor, Faculty of Natural Sciences and Engineering of the Technological Units of Santander

Miguel Angel Urbiztondo Castro, Centro Universitario de la Defensa (CUD)

PhD in Chemical Sciences and Professor, Departament of Chemical Engineering and Environmental Technologies ( IQTMA) 

Maria Pilar Pina Iritia, Universidad de Zaragoza

Associate Professor, Department of Chemical Engineering and Environmental Technologies (IQTMA)

 

 

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Published
2020-06-25
How to Cite
Rodríguez Castro L. M., Urbiztondo Castro M. A., & Pina Iritia M. P. (2020). Influence of boehmite intermediate layer as covalent linker on synthesis of LTA zeolite coatings. Revista Facultad De Ingeniería Universidad De Antioquia, (101), 64-73. https://doi.org/10.17533/udea.redin.20200693