Optical fiber metrology to small displacements detection
DOI:
https://doi.org/10.17533/udea.redin.14663Keywords:
interferometry, silicon micromenbrane, optical fiberAbstract
This work presents a methodology to measure deflections in the range of microns in thermo-pneumatic silicon micomembranes. This method is based on the fiber optic interferometry, which was used to study the static behavior of a silicon membrane of 10 mm in thickness, 5 mm in side length and 300 mm in bulk, which was glued to a glass slide. Static behavior is defines as the membrane deflection measurement taking into account only its response to the infrared radiation energy that drives them.
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